Hi everyone,

i meet a damping calculation problem when i design a microgyroscope,  i
found several damping models in some thesises, but i got many exactly
different results with their equations in the same condition. It's my first
time to design the inertial sensor and with no experience in the clean room,
so i have no idea how different the device performance will be by
this exactly different results.

My questions are :

1 the damping of the system composed of  viscous
damping,thermoelastic damping and anchor losses,
but shall  i need  consider all the damping for the damping coefficient in
the motion equations or  just consider the viscous damping only?

2 how to calculate or deduce the viscous damping(couette damping,squeeze
damping) of the device under the different pressure?

3  Does anyone knows a good paper to discuss the deduction of the viscous
damping?

Thank you for suggestion,

Sincerely yours,

XinYan