You could try reflow in a vacuum oven assuming the resist is amenable.  Pull
vacuum with the temp well above Tg.

-Michael

>>> Kevin Paul Nichols  10/28/2008 1:38 PM >>>
Do you have a desiccator present (bell-jar connected to a roughing vacuum
pump)? If not, a "dirty" vacuum processing tool that nobody will mind having
wet resist placed in? You might be able to get filling that way after doing
your solvent/resist puddle. As a disclaimer, I haven't tried this myself,
but I wouldn't think it would affect the resist much more than a poorly
optimized soft bake would.

- Kevin