Do you want etch through a wafer?

2008/11/13 Sebastian Sosin 

> Does anyone have any knowledge of other etch stop layers for silicon DRIE,
> besides SiO2 and Al? We have an Adixen system and for my process it would
> save extra work to have something else as etch stop layer (not Al or SiO2).
>

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Best regards,
Yours sincerely
Fei Wang
______________
Postdoctoral researcher, Dr
MIC - Department of Micro and Nanotechnology
Technical University of Denmark (DTU)
Building 344, 1st floor, Room no. 130
DK-2800, Kgs. Lyngby
Denmark
Tel:  +45 4525 6311
Fax:  +45 4588 7762
Email: fei.wang@nanotech.dtu.dk
      http://www.nanotech.dtu.dk