Yes! I'm talking about the glass wafer. Yes it is absolutely correct that HF is extremely difficult to deal with glass substrates. Besides, the etching of Nickel is extremely slow in HF as I have mentioned. So I am trying to search out an ambient etchant for etching out out both Ni and Ti. Your comment is highly appreciated. Anirban On Fri, Nov 21, 2008 at 6:18 AM, 汪飞wrote: > Hi, > > Are you talking about a glass wafer? So, why do you want to use HF? > ---ANIRBAN Electrical Engineering Louisiana State University Baton Rouge 70802,USA