Try some Ni etchants. I have one (Ni etchant TFB.
http://microfabrication.colorado.edu/equipment/pdf%20files/ni_etchant.pdf)
in my lab. It will not attack the glass, but I'm not sure how it performs
for Ti.

HF would definitely kill your glass substrate.

Jie

2008/11/21 ANIRBAN SARKAR 

> Yes! I'm talking about the glass wafer. Yes it is absolutely correct that
> HF
> is extremely difficult to deal with glass substrates. Besides, the etching
> of Nickel is extremely slow in HF as I have mentioned. So I am trying to
> search out an ambient etchant for etching out out both Ni and Ti.
>
> Your comment is highly appreciated.
>
> Anirban

****************************************************
*  Zou Jie (Jay)
*  Department of Physics
*  University of Florida
*  Tel: +1-352-846-8018
*  Email: zoujiepku@gmail.com
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