Hey Jie, Thanks very much for the advice. I can replace Titanium by chromium. Will the suggested Ni etchant attack Silicon substrate? Thanks Anirban On Sat, Nov 22, 2008 at 5:13 PM, Jie Zouwrote: > Try some Ni etchants. I have one (Ni etchant TFB. > http://microfabrication.colorado.edu/equipment/pdf%20files/ni_etchant.pdf) > in my lab. It will not attack the glass, but I'm not sure how it performs > for Ti. > > HF would definitely kill your glass substrate. > > Jie ---ANIRBAN Electrical Engineering Louisiana State University Baton Rouge 70802,USA