durusmail: mems-talk: anisotropic Ni etching
Ti and Ni wet etching in HF
2008-11-17
2008-11-21
2008-11-21
2008-11-22
2008-11-23
anisotropic Ni etching
2008-11-23
2008-11-24
2008-12-03
2008-11-28
2008-11-28
2008-11-24
anisotropic Ni etching
Kvel Bergtatt
2008-11-24
try Hot SC1 or Hot Sulfuric.

On Sun, Nov 23, 2008 at 2:40 PM, Maria.Matschuk@nanotech.dtu.dk wrote:

> Dear all,
>
> I also need to etch nickel but I would need to have an anisotroic etch to
> achieve high aspect ratios (at least higher than 1). Is there a dry or wet
> etch process?
>
> Kind Regards
> Maria

--
_fm
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