try Hot SC1 or Hot Sulfuric. On Sun, Nov 23, 2008 at 2:40 PM, Maria.Matschuk@nanotech.dtu.dk wrote: > Dear all, > > I also need to etch nickel but I would need to have an anisotroic etch to > achieve high aspect ratios (at least higher than 1). Is there a dry or wet > etch process? > > Kind Regards > Maria -- _fm