Multiple coats should work but you could also consider a technique called Doctor's blade for such a thick layer. I've never tried it myself but essentially you just pour the SU-8 onto your substrate and planarise it using a flat blade and spacers to define the thickness. However, I would worry about the SU-8 spilling out during softbake for such a thick single layer. Hence multiple coats, softbaking each layer between coats, may be the safest way to go unless someone else can say otherwise about Doctor blading? Whatever method you use, expect to spend some time optimising all the conditions! On Wed, Nov 26, 2008 at 21:31, John Hiltonwrote: > You could always deposit and pattern several layers of whatever max > thickness you can achieve (e.g. 4 layers of 500um thick using SU-8 > 2150). > > On Wed, Nov 26, 2008 at 2:31 PM, A. AhmadShukri > wrote: >> Hi all-- >> >> I am wondering if anyone knows how I can deposit a 2mm (yes, 2,00um) layer >> of SU-8 and pattern it.