durusmail: mems-talk: Germanium dry etch
Germanium dry etch
2008-12-03
2008-12-04
2008-12-04
2008-12-05
Germanium dry etch
Andrea Mazzolari
2008-12-05
Hi,

i need to use only chemical methods, because i need that the sidewalls be of
perfect crystalline quality.

Best regards,
Andrea

> Hi,
> You could try laser drilling for through wafer holes.
>
> Good luck
> Parshant
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