We have the same problem using essentially the same process. We don't do electroplating, but the 200 deg cured SU-8, 10 um thick, does not release from the OmniCoat. We tried warm NanoRemover PG in ultrasonic bath for several hours. The OmniCoat layer is 20-30 nm thick using MicroChem recommended spin process. We thick this is too thin. What methods will spin coat thicker layers of OmniCoat? What process would increase OmniCoat viscosity? Don Friedrich Research & Development JDSU - Advanced Optical Technologies 2789 Northpoint Parkway, M.S. BF-1 Santa Rosa, CA 95407 USA 707-525-7258 (Voice) don.friedrich@jdsu.com