thanks

Problem is solved for now. Exposure power is 17mJ/cm2

Sharma


________________________________
From: Tolga YELBOGA 
To: General MEMS discussion 
Sent: Wednesday, December 17, 2008 2:59:00 PM
Subject: Re: [mems-talk] Az 5412 image reversal receipe

Due to reflection from the Silicon dioxide layer, your features could be
worst.If you decrease the first expose time and also flood expose time
(Approximate FloodExposeTime = FirstExposeTime x 4 ) it should be done.
But i have a question, your exposure power 120mJ/cm2. Is it very high for
your process?
....

Tolga YELBOGA