Hello all -

Does anybody have information about RIE of Sn (tin) metallic thin
films?  I am specifically interested in etching tin selectively over
aluminum.

Recipes or references would be very much appreciated.  Thanks!

Dr. Aaron Datesman
Post-Doctoral Research Associate
Materials Science Division
Argonne National Laboratory
9700 S. Cass Avenue
Bldg. 223, B-217
Argonne, IL 60439

630-252-9154 (office)
630-252-7777 (fax)
773-899-1095 (cell)
datesman@anl.gov