You can make resistors from a variety of different materials whose
resistance characteristic is  given as Ohms/Square. Polysilicon, Ta,
NiCr, Cermets, are all thin film materials that can be sputtered (some
can be ebeamed). The real question is what power you need the resistor
to survive and how long a resistor is acceptable. 50 kOhms could be
made from a short tough cermet like Cr-SiO or a really long NiCr
resistor.

Milton Ohring's book on Thin Film materials has a nice discussion of
resistor films.

http://books.google.com/books?id=SOt_yFjV-
xwC&pg=PP1&dq=Milton+Ohring+materials&ei=YpNaSbOiA5XyNvzXkLkH

Best Regards,
Jon

On Tue, Dec 30, 2008 at 2:05 PM, vaibhav mathur  wrote:
> hi all,
>
> we are working on a MEMS device that requires use of a resistor, of the order
of 50Kohms. could some one suggest wats the best way to incorporate a resistor
in MEMS?? I looked into thin film resistors, also, there is conductive SU-8 .Any
suggestions will be helpful. please let me know if you need for info on the
device, I can attach a rough sketch too.
>
> regards
> Vaibhav Mathur
> Photonics center
> UMass Lowell

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Dr. Jon R. Fox
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