For a list of materials and some of their uses in MEMS, see the materials
lists in the following two papers.
Note that pretty much any material that can be made into a smooth substrate,
or deposited (e.g., sputtered) and patterned might be used in MEMS. It's up
to our collective imagination!

Kirt R. Williams, Kishan Gupta, and Matthew Wasilik, "Etch Rates for
Micromachining Processing-Part II," Journal of Microelectromechanical
Systems, vol. 12, no. 6, Dec. 2003, pp. 761-778.

Kirt R. Williams and Richard S. Muller, "Etch Rates for Micromachining
Processing," Journal of Microelectromechanical Systems, vol. 5, no. 4, Dec.
1996, pp. 256-269.

----- Original Message -----
From: "Kristin Bautista" 
To: 
Sent: Sunday, January 04, 2009 11:22 PM
Subject: [mems-talk] Query on materials used in the manufacture of mems

> Dear all,
>
>  I'm quite new to mems. Where will I be able to get a list of the common
> materials used in the manufacture/cleaning processes of mems?
> Specifically, are calcium- and magnesium-based chemicals or materials
> used?
>
>  Thanks!
>  mel cruz