Dear Cruz

http://www.memsnet.org/material/  might help you


"Kristin Bautista"  writes:
>Dear all,
>
>  I'm quite new to mems. Where will I be able to get a list of the common
materials used in the manufacture/cleaning processes of mems?  Specifically, are
calcium- and magnesium-based chemicals or materials used?
>
>  Thanks!
>  mel cruz
>
>