Hello Taekyng When you say an XeF2 source are you talking about a cylinder of XeF2 or something more complicated? If you look on our web site http://www.xactix.com/suppliers.htm there is a list of suppliers of XeF2. David Springer XACTIX, Inc. 2403 Sidney St. Suite 300 Pittsburgh, PA 15203 Tel: 412 381 1395 Fax: 412 381 1136 email: davids@xactix.com > Hi all, > I am wondering if anybody knows a XeF2 source vendor. > I'd like to build a XeF2 etching system in my lab, but I can't find a vendor > of XeF2 source.