I've had no luck with that technique & thin films.  I once
sponsored a university to research it and they had no luck
either.

Regards,

Dr. Richard Knipe
Digital Imaging
Technology Development Manager
ph 995-3407 or 575-7623
knipe@ti.com


-----Original Message-----
From: Freeman, Alex [mailto:afreeman@ballsemi.com]
Sent: Wednesday, September 16, 1998 7:57 AM
To: MEMS@ISI.EDU
Subject: usefullness of nanoindentation?


Dear researchers,

Can nanoindentation be used to evaluate the thin films (< 1 micron) of
CMOS?  If so, what type of information does it give and what advantages
does it have over other techniques?


Dr. Alex Freeman
Process Development Engineer
Ball Semiconductor,Inc.
972-359-2442
afreeman@ballsemi.com