1.mild sonication can help
2.hot NMP
3.does thin Al layer is lift off easly? maybe the resist is "burned" during
metalization so that it is totaly hard.

ilan

----- Original Message -----
From: "Edward Sebesta" 
To: "'General MEMS discussion'" 
Sent: Thursday, January 15, 2009 8:22 PM
Subject: Re: [mems-talk] Lifting-Off 1um metal


> Are you using evaporation for the metal deposition? What type of metal
> deposition equipment are you using. If not using evaporation for metal
> deposition set parameters for poor step coverage which would be to have
> the substrate cold for starters. However, given you are attempting lift
> off I am assuming the substrate is unheated already.
>
> Also, what is the height of the bi-layer relative to the metal
> thickness?
>
> Edward H. Sebesta
> Independent Process Engineer