Hello Dirk,

Many thanks for your response. I shall have a look at your papers.

I'd like to fabricate a serpentine resistor in Vanadium Oxide; would you
advise me to do this via lift-off or wet/dry etching? I'm leaning
towards lift-off, since it is slightly simpler.

We have the capabilities here at Glasgow to deposit Vanadium Pentaoxide
in the exatc same fashion as you have done.


Dirk.DeBruyker@parc.com wrote:
> We used vanadium oxide as thermistor material for MEMS style calorimeter
arrays, see a.o. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4300493
>
> There are many different vanadium oxides (and phases) and ways of depositing
thin films of it. We deposited vanadium pentoxide by reactive sputtering of
vanadium in a mixed argon/oxygen environment. More info in the paper; or do a
search and follow the links in Google Scholar to more of our publications.
>
> It is easily patterned by wet etching (try a solution of hydrogen peroxide),
or lift-off.
>
> Dirk De Bruyker
> Palo Alto Research Center

Dr. James Paul Grant
Postdoctoral Research Associate
Microsystems Technology Group
76 Oakfield Avenue Room 3
University of Glasgow
Glasgow
Scotland
G12 8LS
Telephone: +44(0)141 330 3374