Dear All, I have a hard time to deposit Chromium (50nm) followed by Platinum (100nm) using a e-beam evaporator. After lift-off (using 1165), some areas of the metal layer will peel off and the rest part has very rough surface. I note that during deposition of Pt, the temperatures is quite high and I have to interrupt the deposition when the temperature reaches 90C and let the system cool down before depositing again. Any suggestions will be appreciated. Best regards Yinyan