Andrea,

By default, AZ9260 is a resist designed for a 6.0 - 8.0 µm coating thickness
when spun between 3000 and 4000 rpm.  One can increase the thickness of a single
pass coating by decreasing the casting rotational velocity but this will come at
the expense of thickness control.  Film thickness of 50 µm might require coating
the resist four times or more!

The best solution is to look for a resist which is designed for the needed
thickness at 3000 rpm.  You can look at the XT and nXT resists from AZ-EM.  They
have materials designed for the thickness range you desire and can be coated in
only one or two passes.

Best Regards,
Garrett Oakes

EV Group
invent * innovate * implement
Regional Sales Manager North America - Direct: +1 (480) 305 2443, Main: +1 (480)
305 2400 Fax: +1 (480) 305 2401
Cell: +1 (480) 516 6724
E-Mail: G.Oakes@EVGroup.com, Web: www.EVGroup.com

-----Original Message-----
From: Andrea Mazzolari [mailto:mazzolari@fe.infn.it]
Sent: Friday, January 23, 2009 3:41 AM
To: General MEMS discussion
Subject: [mems-talk] Thick AZ-9260

Hello All,

i need to deposit a thick AZ-9260 on germanium. I need a thickness of not
less 50um, better 100um.

Does someone have experience to share into deposition of so thick films ?

Best regards,
Andrea