durusmail: mems-talk: sealing cavity in capacitive pressure sensor
sealing cavity in capacitive pressure sensor
2009-01-24
sealing cavity in capacitive pressure sensor
Ulli Hansen - MSG Lithoglas AG
2009-01-25
Hello Reza,

instead of glass frit you could use an evaporation deposited
borosilicate glass layer. The thickness of such layers can be adjusted
very precisely and the glass can be anodically bonded.

Please check out this technology at www.lithoglas.de or contact me directly.

Best regards
Ulli
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