Hi Brad, Thank you very much for your explanation. Just I searched precision glass sphere or bead, but I couldn't find a proper supplier. Do you know one to introduce it to me? Also, I used frit tape instead of paste. Do you think if I use glass frit paste it flows to the cavity due to high pressure and temperature? Best regards, Reza ________________________________ From: Brad CantosTo: rrashidi@mech.ubc.ca; General MEMS discussion Sent: Saturday, January 24, 2009 2:07:13 PM Subject: Re: [mems-talk] sealing cavity in capacitive pressure sensor Reza, One thing that you can try is to mix precision glass spheres of the gap size that you require into your glass frit paste. Once you apply pressure under heat, the spheres will become a spacer to limit and maintain the required gap. You may want to experiment with different size spheres depending on the precision of the gap required. You will find a vendor by googling "precision glass sphere." I used this technique some time ago making a vacuum display. Brad Cantos brad.cantos@holage.com http://holage.com LinkedIn: http://www.linkedin.com/in/bradcantos