durusmail: mems-talk: polymer etch rate
polymer etch rate
2009-01-28
polymer etch rate
junjun wu
2009-01-28
Hi,

I'm looking for a polymer that has etch rate very similar to Si under the
same condition, either wet or dry etching. Various coating methods can be
used, like spin coating, bar coating etc. Any suggestion for polymers and
etching conditions?

Thanks,

--
Junjun Wu
Twin Creeks Technologies
Phone: 408-759-1426
Fax: 408-986-9142
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