durusmail: mems-talk: Double lithography problem with SU1828-TI35ES
Double lithography problem with SU1828-TI35ES
2009-01-29
2009-01-29
2009-01-30
2009-01-30
2009-01-30
2009-01-30
2009-01-30
2009-02-02
Double lithography problem with SU1828-TI35ES
basar bolukbas
2009-01-29
Hello everyone,

I am making lithography with SU1828. After patterning of this resist,
i need to make a another lithography on top of SU1828's patterns, but when i
spin to other resist (TI35ES) the solvent of TI35ES dissolves to patterns of
SU1828.

Do you have similar experience?

Thank you very much for your help.

Best Regards.
reply