Andrea,

Suss contact aligner with back side alignment capability should be able to
do what you need within 1um alignment.

Regards,


On Sun, Jan 18, 2009 at 2:37 AM, Andrea Mazzolari wrote:

> Hello all,
> i need to perform front and back photolitography.
>
> On each side of a 4'' silicon wafer i need to realize geometries of size
> 10um. Geometries on the opposite wafer faces must be aligned with the best
> possible accuracy.
> Here we don't have the possibility to realize front-back photolitography
> and so i plan to ask to some company to do the job for me.
>
> Which is the best precision accuracy which can be obtained on the market ?
>
> Best regards,
> Andrea