you can of course try (110) and (111) silicon wafer

2009/2/5, KUIJPERS, Peter :
> Hi all,
>
> Is there a recipe for wet anisotropic etching of Si?
> Now we use KOH on {1,0,0} wafers, resulting in a slope of 54.7°.
> Maybe another crystal orientation and/or etching agent.
>
> Thanks in advance
>
> Peter Kuijpers

Best regards,
Yours sincerely
Fei Wang
______________
Postdoctoral researcher, Dr
MIC - Department of Micro and Nanotechnology
Technical University of Denmark (DTU)
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Email: fei.wang@nanotech.dtu.dk
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