If you do a solvent clean, your substrate will have a layer of organic molecules clinging to the surface. It might be several molecules thick. Your solvent might have some fractions of higher molecular weight compounds also (high boilers is the slang term) or with different side groups. The spec. for an electronic solvent concerns itself with metals. Some solvents may have some water in them. So with a dehydrate bake you bake off any organics off the surface, water, alcohols, aromatics, alkanes, etc. Baking, raising the temperature of a surface will favor desorption of anything held on by Vander Waals forces, dipole forces, and even chemically bonded materials. Knowing what a specific solvent referred to here would be useful to know. Edward H. Sebesta Independent MEMS and Semiconductor Engineer -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Evelyn B Sent: Saturday, February 07, 2009 10:00 AM To: General MEMS discussion; Evelyn Benabe Subject: [mems-talk] Dehydration bake I have seen dehydration bakes used as part of solvent cleaning of glass and sapphire substrates. What is the purpose/advantage of this bake?