In order to get more useful feedback, can you provide more information
about how you're trying to do this bond? Do you mean room temperature
direct bonding, or are you applying heat and pressure? If so then how,
how much, how long, etc?

-Joe Grogan

jingru zhang wrote:
> Dear all,
>
> Since we don't have equipment for anodic bonding in the lab, I need to
> figure out how to bond silicon and glass together by fusion bonding?
> However, I tried lots of pieces and they all failed. I did HF and RCA 1
> clean for both silicon substrate (with pattern on it) and glass before
> bonding but it 's not bonding. Does anyone have done silicon and glass
> fusion bonding before? Any suggestions will be appreciated.
>
> Thank you.
>
> Best,
> Jingru