Do you have plasma equipment?  Plasma bonding is possible.  Bill Moffat

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of jingru zhang
Sent: Tuesday, February 10, 2009 10:12 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Silicon_Glass Fusion Bonding

Dear all,

Since we don't have equipment for anodic bonding in the lab, I need to
figure out how to bond silicon and glass together by fusion bonding?
However, I tried lots of pieces and they all failed. I did HF and RCA 1
clean for both silicon substrate (with pattern on it) and glass before
bonding but it 's not bonding. Does anyone have done silicon and glass
fusion bonding before? Any suggestions will be appreciated.

Thank you.

Best,
Jingru