Hi Bill,

Thank you for your information. We have nitrogen plasma and Oxygen plasma
here, and I will try plasma treatment next time.

2009/2/10 Bill Moffat 

> Experience to date with customers using YES plasma equipment for plasma
> bonding.  The first is a company bonding silicon wafers to silicon
> wafers.  For this they us about 10 minutes of Argon plasma and just
> place the plasma bonded surfaces next to each other and squeeze.  The
> result is a silicon wafer twice as thick.  The one I can quote because I
> did the plasma bonding for a customer in Norway is plasma bonding a
> flexible array that is a proprietary Dupont material to a super clean
> glass slide.  The flexible array is a DNA well construction about 100
> holes down to the glass slide.  The object is to glue the array to the
> glass slide without chemicals that would be a problem for the DNA
> solution.  But no solution can make its way to another well.  Because
> the flexible Dupont plastic had a problem with temperature and plasma
> raises the temperature I finished up with a 15 second plasma using Argon
> and just slapped the 2 surfaces together.  An intimate weld.  The
> company in Norway bought a plasma unit, and I have a slide on my desk
> that is 5 years old and the parts have not separated.  In fact the slide
> has broken due to efforts to remove the flexible plastic but they are
> still stuck together.  Hope this helps.
>
> Bill Moffat, CEO
> Yield Engineering Systems, Inc.