Thick uniform coating a paint roller.  Thinner uniform coating dilute
the resist and use a small air brush, model manufacturers use them a
lot.  Most novel if you want to experiment use a child's bubble wand
create a meniscus of resist and hold the chip vertically and pop it
through the meniscus.  Good luck.  Bill Moffat

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of LIN LI
Sent: Wednesday, February 11, 2009 11:44 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] pattern on 3by3mm Si Chip


Hi,

Is there a good way to spin coat Photoresist and pattern the metal on a
just 3by3 silicon chip?
I'm having difficulty in getting uniform coating on the small chip.

Thanks.

--
Lin Li