One more potentially useful method ... one can also deposit the film (of same
thickness as desired) onto a glass slide, weigh it, etch the film off in acid,
and weigh the bare glass slide to determine the film's mass. One only needs in
addition the film density and area of the slide. I did this once using a
refurbished Cahn-G2 electrobalance with ~50 ng resolution, and the results were
in agreement with average film thicknesses from an AFM profilometer. See Meas.
Sci. Technol. 18 (2007) N53-N59.

Thomas E. Wilson
Professor of Physics
Marshall University
Science 154
One John Marshall Drive
Huntington, WV  25755-2570
Tel: 304.696.2752
FAX: 304.696.2494