Hi Don, thanks for your reply.

The substrate will be polished <100> silicon, both as a bulk substrate
and also as SOI (I have two applications). For some of the MgF2 layers
there will be a layer of e-beam or thermally evaporated germanium
between the MgF2 and the silicon.

Regards

Jason Milne
Microelectronics Research Group
The University of Western Australia


Quoting Don Friedrich :

> What is the substrate material & polish?
>
> Don Friedrich
> JDSU - Advanced Optical Technologies