If the wider channel tend to crack more the cracking might be a result of stress due to the air pressure on the glass due to the partial vacuum inside after cooling. -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of jingru zhang Sent: Friday, February 27, 2009 4:47 PM To: General MEMS discussion Subject: Re: [mems-talk] glass cracking during anodic bonding I have different dimensions. For example, the width of the channel is 200 microns, and the depth is 100 microns.