durusmail: mems-talk: glass cracking during anodic bonding
glass cracking during anodic bonding
2009-02-26
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glass cracking during anodic bonding
shay kaplan
2009-02-28
If the wider channel tend to crack more the cracking might be a result of
stress due to the air pressure on the glass due to the partial vacuum inside
after cooling.

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of jingru zhang
Sent: Friday, February 27, 2009 4:47 PM
To: General MEMS discussion
Subject: Re: [mems-talk] glass cracking during anodic bonding

I have different dimensions. For example, the width of the channel is 200
microns, and the depth is 100 microns.

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