Dear Brent,

Thank you for your reply, I think Your method would suit my purpose.
The only thing I don t understand is the setup: how do you manage to put laser
and detector outside the chamber and get an image? Are these two components just
kept outside the plasma range? Is that what you are trying to do? Why do you use
HeNe laser? Is it because it is not disrupted by the frequency in the chamber?
Also one more question:  what type of photodetector do ypu use? is it a CCD?

Many thanks again.

Regards.

Ghazal

________________________________________
From: Brent Garber [garber@engr.uconn.edu]
Sent: Friday, March 06, 2009 8:23 PM
To: General MEMS discussion
Subject: Re: [mems-talk] CCD in plasma chamber

Ghazal,

I bounce a HeNe laser off my sample and it reflects on to a photo
detector which is connected to a strip chart recorder.  The laser and
detector are outside the chamber.

Brent