durusmail: mems-talk: ask for help -recipe for SPR511A and MF CD-26
ask for help -recipe for SPR511A and MF CD-26
2009-03-15
ask for help -recipe for SPR511A and MF CD-26
QiuWeibin
2009-03-15
Hi all

   Is there anyone who has the experiences on SPR511A photoresist with developer
MF CD-26 ?

   I used  Karl Suss MBJ-3 mask aligner, and could not get a good pattern even
for 2um with developer MF CD-26. is there anyone who can help me? thanks a lot.

    Qiu
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