Hello,

I just bought some plastic mask, and I attached them onto a glass plate.
I want to use these mask for contact lithography on SU-8 layer.
I am wondering if the SU-8 layer would stick to the plastic mask after
exposure. Or should I use the opposite side of the mask (i.e. glass plate)
for contact with SU-8 layer?

But in this way, the lithography won't be the contact one.
Does anyone has that experience? Please give me some advices.

Thanks!

--
Best Regards,

Ruilin Zheng

Address:
Pen-Tung Sah MEMS Research Center,
Xiamen University, Xiamen,361005,
P.R.China