I tried that, and it didn't work. No amount of baking in a vacuum made much difference. However, as the other responder said, if it is due to thermal mismatch of the metal and the SU8, then active cooling might be an option. I had not thought of that before, so I am going to give that a try. On Wed, Mar 18, 2009 at 5:19 PM, Andrea Lucibellowrote: > Hi all, > and thanks in advance for the suggestions...do you think that is possible > to bypass the problem making the Post bake in a vacuum oven in order to > eliminate the outgassing of the uncrosslinked SU-8?What do you if instead of > Cr i try to deposit the Ti? > > Andrea Lucibello -- Andrew Sarangan Associate Professor Electro-Optics Graduate Program University of Dayton Dayton, OH