Dear Dr. Mihaela Carp, thanks in advance for you suggestions. If i well understand you suggest me to make the hard bake also to the Uncrosslinked part of the SU-8 , but i'm afraid that doing the hard bake to the Uncrosslinked SU-8, this last one can undergoes to deformations losing its planar characteristics(Tg of Uncrosslinked SU-8 is 55°C)...with this omincoat there is the possibility that the wrinkles in the uncrosslinked SU-8 doesn't appear?...However i'm going to do the Hard bake in a vacuum oven i will inform you as soon as possible of the results! Thanks again!