Try photopatternable PDMS

Hong Chen

On Mon, Mar 23, 2009 at 1:58 PM, 王××  wrote:
> I want to make some 50um deep PDMS channels on a glass wafer surface.
>
> However I can't use the typical PDMS process, which includes making master
using SU-8, then pouring PDMS and bonding PDMS with Glass.
>
> Are there any suggestions?
>
> My Idea:
>
> 1. Pattern the channel using negative mask (dark in channel area), use
positive PR (AZ4620)
>
> 2. Spin coat PDMS on top of AZ4620 pattern.
>
> 3. Spin coat AZ4210 or AZ4110 on top of PDMS
>
> 4. Pattern the AZ4210 using positive mask (transparent in channel area)
>
> 5. After exposing the channel area from last step, Use RIE to etch the PDMS
away and expose the AZ4620.
>
> 6. Use Acetone to remove the AZ4620.
>
> My concern is the PDMS might have a climbing effect on step 2, so the PDMS
surface will not be flat.

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