durusmail: mems-talk: SU8 shrinking
SU8 shrinking
2009-03-31
2009-03-31
SU8 shrinking
kamlesh_engg@iitb.ac.in
2009-03-31
hi all
      i am spin coating SU8 2050 on piranha cleaned silicon wafer but
    during prebake it is shrinking and coming into the center of the
    wafer. What could be the possible cause ?
--
Kamlesh Pawar
M.Tech (Biomedical Engg)
Mob :+919870062960
IIT-Bombay


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