I am looking for advice to bond a PDMS flow cell to a silicon chip.
When I attempt to send fluid through the 20um wide and 120um high
channels, the PDMS lifts off the silicon wafer. I usually clean the
PDMS and the silicon using 20sscm flow of oxygen with an RIE, at 100W
50mTorr for 1 minute. The PDMS flow cell is approxiately 10mm x 5mm.
Has anyone had success with a PDMS sample of that size? Thank you for
your time.

Willie Feng