Matt,

Manual wafer handling is becoming a lost art. You need to use two cassettes
and a standard 200mm vacuum wand. Start at slot 1 (slot 1 is at the H bar)
process wafer than place in slot 25 in the second cassette slot 2 will go in
slot 24 and so on. When processing is complete wafer 25 is available in slot
1 for the safe return to its original slot in the empty cassette.

Best regards,
Glenn

-----Original Message-----
From: Matthew Walker [mailto:matt_w@optusnet.com.au]
Sent: Tuesday, April 07, 2009 2:04 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Vacuum wand for 25 wafer Crystralpaks


Hi All,

We have 8" thinned wafers tape bonded to glass carriers (without notch),
so a little thicker and heavier than a normal 8" wafer, 25 to a crystalpak.
The crystalpak cassette has a 1/4" (6.25mm) spacing from the centre to
centre of each slot.
We have observed some contamination on the mems due to manual handling
so we are having a rethink.
We have tried some mechanical pistol tweezers but have had also seen
cracks the glass carrier caused by the locating tweezer pins.

Does anyone have any generic wafer handling guidelines that they would
like to share?

Does anyone have any recommendations for a vacuum wand body/tip that
will fit down between the wafers for manual load/unload?

thanks and regards,

    Matt