Thank you!

I think the silane treatment time may be a problem.

I did 15 minutes of silane, as I've read off from a paper.

I'll try doing at least an hour and see how it goes.

Again, thank you so much!


Best,

TJ

> Date: Fri, 10 Apr 2009 11:25:54 -0700
> From: debkishore.mitra@gmail.com
> To: mems-talk@memsnet.org
> Subject: Re: [mems-talk] Problem with oxygen plasma bonding of two pdms slabs
>
> Hey TJ,
>
> If you are not overexposing your wafer to silane, silane should not be
> sticking to your PDMS. So you might want to look into your silanization
> protocol (I use dessicator chamber for 1-2 hrs, but for more accurate
> deposition you might want to use a more sophisticated monolayer deposition
> systems). Otherwise you might consider washing your PDMS slab with IPA and
> water prior to bonding. Also, when trying to bond PDMS to PDMS, I have seen
> that after bonding, the bonding strength increases if heated to about 60
> degree celsius, and then kept overnight.
>
> Hope this helps
>
> --
> Debkishore Mitra