Hello,

I am looking for services/vendors in the area of "high density plasma"- CVD
(HDP-CVD) of Silicon Nitride films.

The motivation to go for HDP-CVD is to get higher wet etch resistance (BOE/Conc.
HF) than that provided by the PECVD films. If any info/references are available
on improving wet etch resistance of PECVD films, that will be very helpful as
well.

Thank for the time and best regards,
Harshal Surangalikar.

Sr. MEMS Process Engineer
Fortemedia
Cupertino, CA