I wish to etch circle shape mask opening with negligible underetching at the
edges

Kim

On Mon, 20 Apr 2009 05:50:35 +0530  wrote
>Do you mean semicircular in cross section?  And do you mean really
>semicircular, or merely semi oval?
>
>At 05:51 AM 4/19/2009, you wrote:
>>Hi
>>Is it possible to make circular grooves (about 50 um deep) in
>>{100}-Si by wet etching.
>>
>>Any suggestion will be highly appreciated.