Hi Pavan,

before bonding the foil to the frame you have to stretch the foil uniformly
using some stretching device. For the rectangular foil I used four clamps (one
on each side) connected to one common thick frame. I can give you a foto if you
like. This will require some additional material for the borders.

Regards,
Svyatoslav Alimov.

----- Ursprüngliche Mail ----
Von: Pavan Samudrala 
An: General MEMS discussion 
Gesendet: Dienstag, den 28. April 2009, 05:07:37 Uhr
Betreff: [mems-talk] Lithography on Cu foils

Hello all,

I was wondering if anyone had experience doing lithography on foils. I am
trying to pattern 3um features on a foil using MA8 and cannot get the foil
flat to the surface of photomask. I tried bonding the borders of the foil to
rectangular frame but still had some wrinkles (folds) which makes it
difficult to pattern. The backside of the foil is also important and cannot
destroy it. Any ideas would be appreciated.

Thanks,

Pavan Samudrala