Hi all! I'm trying to think of a way to make a 2mm diameter through hole in a pyrex wafer. I thought of etching the hole with DRIE, but thought it was inefficient and time consuming. It also seems that I can't use conventional drilling machines to bear holes in the pyrex as the substrate is to brittle. Does anyone know how to drill holes in pyrex/glass wafers? The features don't have to be too accurate.. Thanks! TJ