You might try laser-pulse drilling or water jet.

--
Brian C. Stahl
Graduate Student Researcher
UCSB Materials Research Laboratory
brian.stahl@gmail.com / bstahl@mrl.ucsb.edu
Cell: (805) 748-5839
Office: MRL 3117A


On Fri, May 1, 2009 at 1:31 PM, 김태진  wrote:

> Hi all!
>
> I'm trying to think of a way to make a 2mm diameter through hole in a pyrex
> wafer.
>
> I thought of etching the hole with DRIE, but thought it was inefficient and
> time consuming.
>
> It also seems that I can't use conventional drilling machines to bear holes
> in the pyrex as the substrate is to brittle.
>
> Does anyone know how to drill holes in pyrex/glass wafers?
>
> The features don't have to be too accurate..
>
> Thanks!
>
> TJ